au.\*:("BERBERIG, O")
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The Prandtl micro flow sensor (PMFS) : a novel silicon diaphragm capacitive sensor for flow-velocity measurementBERBERIG, O; NOTTMEYER, K; MIZUNO, J et al.Sensors and actuators. A, Physical. 1998, Vol 66, Num 1-3, pp 93-98, issn 0924-4247Conference Paper
